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 Model Number |
KIS 2000/3000 |
Application
The KIS 2000-Kerf Inspection System is an innovative
stand-alone automatic
dicing wafer inspection system, which finally enables the detection
of any deviation in the dicing process by implementing SPC.
Specification
Wafer
diameter |
up
to 300mm |
Automatic
wafer loading |
Optional
|
Wafer
Inking |
Optional
|
Computer |
PC
Pentium MMX 2000 MHz |
Operration
system |
Windows
NT |
Frame
Grabber |
Matrox
PCI frame Grabber |
Z
stage |
-
25mm/0.1µm accuracy
-
300mm/ 2µm accuracy |
Microscope |
2.5x
to 10x |
Camera |
Black
and white CCD high resolution camera |
Product Lines
Dicing Process Automatic Wafer Inspection and Diagnostic Systems
KIS2010 |
Automatic
kerf inspection system for 4", 6" & 8" wafer. |
KIS2010AL |
KIS2010
Wafer Inspection System equipped with AL2000 Auto Loader
module for in-line inspection in production mode. |
KIS3000 |
Automatic
Wafer Dicing Inspection System for 4", 6", 8" & 12" wafer. |
KIS3000AL |
KIS3000
Inspection System equipped with AL3000 Auto Loader module
for in-line inspection in production mode. |
Accessories
|
AL2010 |
Auto
Loader module for KIS2010. Enable in-line inspection in
production mode. |
AL3000 |
Auto
Loader module for KIS3000. Enables in-line inspection
in production mode. |
SPC
RV/32010 |
Remote
off-line SPC Review Station for KIS2010 - includes image
verifcation and measurement in the database. |
SPC
RV3000 |
Remote
off-Line SPC Review Station for KIS2010 - includes image
verifcation and measurement in the database. |
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